HILLOCK-FREE ALUMINUM THIN FILMS FOR ELECTRONIC DEVICES

[11] INTERACTION OF VACANCIES WITH SN ATOMS AND THE RATE OF G-P ZONE FORMATION IN AN AL-CU-SN ALLOY [J]. ACTA METALLURGICA, 1961, 9 (12): : 1076 - 1078

[12] DIFFUSION OF AL-26 AND MN-54 IN ALUMINUM [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) : 1671 - &

[13] McLean D., 1957, GRAIN BOUNDARIES MET, P116

[14] OHTA M, 1965, J JPN I MET, V29, P93

[15] PADDOCK AD, 1968, SPR EL SOC, P247

[16] THERMAL CYCLING AND SURFACE RECONSTRUCTION IN ALUMINUM THIN FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (03) : 361 - &

[17] SHEWMON PG, 1963, DIFFUSION SOLIDS, P111

[18] TAKAMURA J, 1965, LATTICE DEFECTS QUEN, P521

[19] TAKAMURA J, 1967, 22 M PHYS SOC JAP, V1

[11] INTERACTION OF VACANCIES WITH SN ATOMS AND THE RATE OF G-P ZONE FORMATION IN AN AL-CU-SN ALLOY [J]. ACTA METALLURGICA, 1961, 9 (12): : 1076 - 1078

[12] DIFFUSION OF AL-26 AND MN-54 IN ALUMINUM [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) : 1671 - &

[13] McLean D., 1957, GRAIN BOUNDARIES MET, P116

[14] OHTA M, 1965, J JPN I MET, V29, P93

[15] PADDOCK AD, 1968, SPR EL SOC, P247

[16] THERMAL CYCLING AND SURFACE RECONSTRUCTION IN ALUMINUM THIN FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (03) : 361 - &

[17] SHEWMON PG, 1963, DIFFUSION SOLIDS, P111

[18] TAKAMURA J, 1965, LATTICE DEFECTS QUEN, P521

[19] TAKAMURA J, 1967, 22 M PHYS SOC JAP, V1