DIFFUSION OF EXCESS VACANCIES TO FREE SURFACES AND VOIDS IN THIN-FILMS

被引：16

作者：

LLOYD, JR ^{[1
]}

NAKAHARA, S ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 12期

关键词：

D O I：

10.1149/1.2131359

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2037 / 2041

页数：5

共 14 条

[1] GRAIN COARSENING AND GAS-BUBBLES IN ANNEALED GOLD-FILMS [J].

ANDREW, R ;

KRASEVEC, V .

PHILOSOPHICAL MAGAZINE, 1975, 31 (06) :1295-1306

[2] ON THE QUENCHING OF VACANCIES IN A FINE GRAINED POLYCRYSTAL [J].

BLANDIN, A ;

FRIEDEL, J .

ACTA METALLURGICA, 1960, 8 (06) :384-387

[3] AN EXPERIMENTAL DETERMINATION OF THE ELECTRICAL RESISTIVITY OF STACKING FAULTS AND LATTICE VACANCIES IN GOLD [J].

COTTERILL, RMJ .

PHILOSOPHICAL MAGAZINE, 1961, 6 (71) :1351-&

[4]

CRANK J, 1967, MATH DIFFUSION

[5]

DOREY AP, 1969, THIN SOLID FILMS, V4, P451

[6] STUDY ON VACUUM DEPOSITION OF METALS .2. ON THE CHANGE WITH AGING TIME IN THICKNESS AND RESISTIVITY OF VACUUM DEPOSITED GOLD FILM [J].

FUJIKI, Y .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1959, 14 (10) :1308-1313

[7] THEORY OF DIFFUSION-LIMITED PRECIPITATION [J].

HAM, FS .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1958, 6 (04) :335-351

[8]

HERAS JM, 1976, THIN SOLID FILMS, V35, P83

[9]

LLOYD JA, UNPUBLISHED

[10] VOIDS IN THIN AS-DEPOSITED GOLD-FILMS PREPARED BY VAPOR-DEPOSITION [J].

LLOYD, JR ;

NAKAHARA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :655-659

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