DENSITY OF METASTABLE STATES OF ARGON IN A SPUTTERING GLOW-DISCHARGE

被引：4

作者：

FOURRIER, C

LEMPERIERE, G

POITEVIN, JM

机构：

来源：

PHYSICS LETTERS A | 1979年 / 74卷 / 05期

关键词：

D O I：

10.1016/0375-9601(79)90805-3

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：313 / 315

页数：3

共 10 条

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POITEVIN, JM .

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[3]

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GILL, P ;

WEBB, CE .

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[5]

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[6]

Golubovskii Yu. B., 1976, Optics and Spectroscopy, V40, P557

[7]

Golubovskii Yu. B., 1972, Optics and Spectroscopy, V33, P440

[8]

MITCHELL, 1971, RESONANCE RAD EXCITE, P121

[9] ELECTRON-ENERGY DISTRIBUTIONS IN A SPUTTERING DISCHARGE [J].

POITEVIN, JM ;

LEMPERIERE, G ;

FOURRIER, C .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (05) :749-759

[10] DC DIODE SPUTTERING OF TITANIUM - DETERMINATION OF OPTIMAL DEPOSITION CONDITIONS BY ELECTRICAL AND SPECTROSCOPIC INVESTIGATIONS [J].

POITEVIN, JM ;

LEMPERIERE, G ;

FOURRIER, C .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1976, 9 (12) :1783-1795

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