DC DIODE SPUTTERING OF TITANIUM - DETERMINATION OF OPTIMAL DEPOSITION CONDITIONS BY ELECTRICAL AND SPECTROSCOPIC INVESTIGATIONS

被引：8

作者：

POITEVIN, JM ^{[1
]}

LEMPERIERE, G ^{[1
]}

FOURRIER, C ^{[1
]}

机构：

[1] UNIV NANTES,INST PHYS,LAB PHYS CORPUSCULAIRE,F-44037 NANTES,FRANCE

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1976年 / 9卷 / 12期

关键词：

D O I：

10.1088/0022-3727/9/12/017

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1783 / 1795

页数：13

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[7]

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[9]

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[10]

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