IN-SITU MONOCHROMATIC AND SPECTROSCOPIC OPTICAL INVESTIGATIONS OF DIAMOND THIN-FILM GROWTH

被引：6

作者：

MOULIN, S

BONNOT, AM

机构：

[1] Laboratorie d'Etudes des Propriétés Electroniques des Solides, Centre National de la Recherche Scientifique, 38042 Grenoble Cedex 9, associe a l'Universite J. Fourier

来源：

关键词：

D O I：

10.1016/0925-9635(94)90228-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In situ monochromatic and spectroscopic optical measurements were taken on diamond films synthesized by hot filament assisted chemical vapor deposition (HFCVD). Measurement of the reflectivity and elastic scattering of light using a fixed wavelength enabled the different stages of diamond film formation to be followed in terms of kinetics. Spectroscopic differential reflectivity, down to the vicinity of the bulk diamond absorption threshold, gave information on the evolution of the surface electronic properties. In particular, diamond crystal growth is preceded by an incubation period, during which the following is observed: first the deposition of sp2 carbon species, second etching of the sp2 carbon species or/and the deposition of sp3 carbon species.

引用

页码：577 / 580

页数：4

共 17 条

[1] OPTICAL CHARACTERIZATION OF DIAMOND [J].

BACHMANN, PK ;

WIECHERT, DU .

[2] RAMAN MICROSPECTROSCOPY OF DIAMOND CRYSTALS AND THIN-FILMS PREPARED BY HOT-FILAMENT-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

BONNOT, AM .

PHYSICAL REVIEW B, 1990, 41 (09) :6040-6049

[3]

BONNOT AM, 1993, APPL PHYS LETT, V63, P174

[4] INSITU MONITORING OF CRYSTAL-GROWTH BY REFLECTANCE DIFFERENCE SPECTROSCOPY [J].

COLAS, E ;

ASPNES, DE ;

BHAT, R ;

STUDNA, AA ;

HARBISON, JP ;

FLOREZ, LT ;

KOZA, MA ;

KERAMIDAS, VG .

JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) :47-55

[5] A SPECTROSCOPIC STUDY OF OPTICAL-CENTERS IN DIAMOND GROWN BY MICROWAVE-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

COLLINS, AT ;

KAMO, M ;

SATO, Y .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2507-2514

[6] NUCLEATION OF DIAMOND ON SILICON, SIALON, AND GRAPHITE SUBSTRATES COATED WITH AN A-C-H LAYER [J].

DUBRAY, JJ ;

PANTANO, CG ;

MELONCELLI, M ;

BERTRAN, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (06) :3012-3018

[7] INVESTIGATION OF GROWTH-RATES AND MORPHOLOGY FOR DIAMOND GROWTH BY CHEMICAL VAPOR-DEPOSITION [J].

EVERSON, MP ;

TAMOR, MA .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1438-1444

[8]

Field J.E., 1979, PROPERTIES DIAMOND

[9] GRAIN-GROWTH IN 3 DIMENSIONS DEPENDS ON GRAIN TOPOLOGY [J].

GLAZIER, JA .

PHYSICAL REVIEW LETTERS, 1993, 70 (14) :2170-2173

[10] ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY DEVELOPMENT DURING LOW-PRESSURE DIAMOND FILM GROWTH [J].

MATHIS, BS ;

BONNOT, AM .

← 1 2 →