SOL-GEL-DERIVED TIN OXIDE THIN-FILMS

被引：93

作者：

PARK, SS

MACKENZIE, JD

机构：

[1] Department of Materials Science and Engineering, University of California-Los Angeles, Los Angeles

来源：

THIN SOLID FILMS | 1995年 / 258卷 / 1-2期

关键词：

ELECTRICAL PROPERTIES AND MEASUREMENTS; ELECTRON MICROSCOPY; OPTICAL PROPERTIES; TIN OXIDE;

D O I：

10.1016/0040-6090(94)06404-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent conducting thin films of SnO2-x have been prepared from tin alkoxide by dip coating. The influence of the dip coating parameters such as solution concentration, the withdrawal speed of substrates from solution, firing temperature, and the number of coating applications on the thickness, electrical and optical properties of the films was investigated. The study demonstrates that the films with thickness of 0.8-1.1 mu m have sheet resistances as low as 52-85 Omega rectangle(-1) (or a resistivity of about 6 x 10(-3) Omega cm) and average visible transmittance of 84-89% in the wavelength range 0.4-0.7 mu m. The morphology, surface structure and composition of the films were investigated by scanning electron microscopy, transmission electron microscopy, X-ray diffraction, and Auger electron spectroscopy.

引用

页码：268 / 273

页数：6

共 23 条

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