SECONDARY-NEUTRAL AND SECONDARY-ION MASS-SPECTROMETRY ANALYSIS OF TIN-BASED HARD COATINGS - AN ASSESSMENT OF QUANTIFICATION PROCEDURES

被引:14
作者
BOCK, W
GNASER, H
OECHSNER, H
机构
[1] UNIV KAISERSLAUTERN,FACHBEREICH PHYS,D-67663 KAISERSLAUTERN,GERMANY
[2] UNIV KAISERSLAUTERN,INST OBERFLACHEN & SCHICHTANALYT,D-67663 KAISERSLAUTERN,GERMANY
关键词
MASS SPECTROMETRY; CESIUM; COATINGS; SECONDARY-NEUTRAL AND SECONDARY-ION MS; THIN FILMS; TITANIUM;
D O I
10.1016/0003-2670(93)E0626-I
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Secondary-neutral mass spectrometry (SNMS) utilizing electron-gas post-ionization and secondary-ion mass spectrometry (SIMS) monitoring MCs(+) ion species (M stands for a sample component) were used to characterize TiN-based film structures, namely TiCN and TiAlN/TiN. It is shown that for both techniques a quantitative evaluation of the depth-dependent composition is possible employing relative sensitivity factors. While the latter were derived from various standard materials, the corresponding factor for C/N could be determined from a correlation of the respective intensities in the TiCN specimen and rendered a standard superfluous for those elements; this approach was found to work for both SNMS and SIMS. The sample compositions determined by these techniques exhibit generally a good agreement with respect to the absolute concentration values and their depth dependence; a possible exception is the Ti/N ratio in the TiAlN sample which appears larger in SNMS than in SIMS. The general concepts of quantification using relative sensitivity factors and their transferability among different specimens are discussed.
引用
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页码:277 / 283
页数:7
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