A NEW SECONDARY ION MASS-SPECTROMETRY TECHNIQUE FOR III-V SEMICONDUCTOR COMPOUNDS USING THE MOLECULAR-IONS CSM

被引：274

作者：

GAO, Y

机构：

来源：

关键词：

D O I：

10.1063/1.341381

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3760 / 3762

页数：3

共 8 条

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[5] GAUNEAU M, 1984, J MICROSC SPECT ELEC, V9, P451
[6] KAISER U, IN PRESS J VAC SCI T
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STREIT, LA
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