QUANTITATIVE-ANALYSIS AND DEPTH PROFILING OF RARE-GASES IN SOLIDS BY SECONDARY-ION MASS-SPECTROMETRY - DETECTION OF (CSR)+ MOLECULAR-IONS (R = RARE-GAS)

被引：72

作者：

RAY, MA

BAKER, JE

LOXTON, CM

GREENE, JE

机构：

[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.574966

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：44 / 50

页数：7

共 24 条

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