共 15 条
[2]
ATOMIC SCALE STUDY OF LOCAL TISI2/SI EPITAXIES
[J].
JOURNAL OF APPLIED PHYSICS,
1990, 67 (04)
:1820-1825
[3]
CATANA A, 1989, MATER RES SOC S P, V139, P369
[5]
KERN R, 1979, CURRENT TOPICS MATER, V3
[6]
Lau C. K., 1982, International Electron Devices Meeting. Technical Digest, P714
[7]
MURAKA SP, 1980, J VAC SCI TECHNOL, V17, P871
[8]
Okabayashi H., 1982, International Electron Devices Meeting. Technical Digest, P556
[9]
OSBURN CM, 1988, J ELECTROCHEM SOC, V35, P1490
[10]
OSBURN CM, 1982, 1ST P INT S VLSI SCI, P213