DESIGN AND PERFORMANCE OF QUADRUPOLE-BASED SIMS INSTRUMENTS - A CRITICAL-REVIEW

被引:84
作者
WITTMAACK, K [1 ]
机构
[1] CITY LONDON POLYTECH,DEPT PHYS,LONDON EC3N 2EY,ENGLAND
关键词
D O I
10.1016/S0042-207X(82)80001-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
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页码:65 / 89
页数:25
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共 115 条
[1]   NEGATIVE ION BOMBARDMENT OF INSULATORS TO ALLEVIATE SURFACE CHARGE-UP [J].
ANDERSEN, CA ;
RODEN, HJ ;
ROBINSON, CF .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (08) :3419-+
[2]  
Banford AP., 1966, TRANSPORT CHARGED PA
[3]   ENERGY-SPECTRA OF SECONDARY IONS EMITTED DURING ION-BOMBARDMENT [J].
BAYLY, AR ;
MACDONALD, RJ .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 34 (04) :169-181
[4]   INELASTIC-COLLISIONS AT ION BOMBARDED SURFACE .1. STUDIES IN SECONDARY ION AND PHOTON EXCITATION [J].
BAYLY, AR ;
MARTIN, PJ ;
MACDONALD, RJ .
NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :459-466
[5]   MASS AND ENERGY SPECTROMETER FOR SECONDARY ION ANALYSIS [J].
BAYLY, AR ;
MACDONALD, RJ .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1977, 10 (01) :79-85
[6]   TANDEM MASS SPECTROMETER FOR SECONDARY ION STUDIES [J].
BENNINGHOVEN, A ;
LOEBACH, E .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (01) :49-+
[7]   DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1975, 53 (DEC) :596-625
[8]   OBSERVATION ON SURFACE-REACTIONS WITH STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY .1. METHOD [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1971, 28 (02) :541-+
[9]   SURFACE INVESTIGATION OF SOLIDS BY STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS) [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1973, 35 (01) :427-457
[10]  
Bernheim M., 1973, International Journal of Mass Spectrometry and Ion Physics, V10, P293, DOI 10.1016/0020-7381(73)83007-4