INTERFERENCE GRATINGS BLAZED BY ION-BEAM EROSION

被引：10

作者：

JOHNSON, LF

INGERSOLL, KA

机构：

[1] Bell Laboratories, Murray Hill

来源：

APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 07期

关键词：

D O I：

10.1063/1.91186

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The use of ion-beam erosion to transform rounded symmetric grating relief patterns into asymmetric profiles with planar facets and sharp angular features is described. Calculated profiles are confirmed by experimental profiles produced in GaAs but with significant modifications caused by redeposition. Higher efficiency interference (holographic) gratings for spectroscopic and integrated optics applications are suggested by these results.

引用

页码：500 / 503

页数：4

共 4 条

[1] GENERATION OF PERIODIC SURFACE CORRUGATIONS
JOHNSON, LF
KAMMLOTT, GW
INGERSOLL, KA
[J]. APPLIED OPTICS, 1978, 17 (08) : 1165 - 1181
[2] EVOLUTION OF GRATING PROFILES UNDER ION-BEAM EROSION
JOHNSON, LF
[J]. APPLIED OPTICS, 1979, 18 (15) : 2559 - 2574
[3] DRY PROCESSING OF HIGH-RESOLUTION AND HIGH ASPECT RATIO STRUCTURES IN GAAS-ALXGA1-XAS FOR INTEGRATED-OPTICS
SOMEKH, S
CASEY, HC
[J]. APPLIED OPTICS, 1977, 16 (01) : 126 - 136
[4] MICROTOPOGRAPHY OF SURFACES ERODED BY ION-BOMBARDMENT
STEWART, ADG
THOMPSON, MW
[J]. JOURNAL OF MATERIALS SCIENCE, 1969, 4 (01) : 56 - &

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