THE EVOLUTION OF SPUTTERED IRON NITRIDE THIN-FILMS UNDER THERMAL-TREATMENT

The thermal evolution of reactively sputtered iron nitride thin films has been investigated by x-ray diffraction, Mossbauer conversion electron spectroscopy, transmission electron microscopy, and magnetic measurements. The results show that, independently of the original nitrogen content of the films, a similar composition of the end products after the 500-degrees-C annealings is reached, being all composed of alpha-Fe plus gamma'-Fe4N in a wide range of relative proportions. The magnetic characteristics, however, are different depending on the nitrogen content of the as-deposited films.