DEEP UV PHOTORESIST CONTAINING ORTHO-NITROBENZYLSILYLETHER STRUCTURE IN THE MAIN CHAIN

被引：17

作者：

HAYASE, S

ONISHI, Y

HORIGUCHI, R

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 09期

关键词：

D O I：

10.1149/1.2100870

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2275 / 2280

页数：6

共 25 条

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