CHEMICAL ETCHING OF HIGH-TC SUPERCONDUCTING FILMS IN FELIOX-115 SOLUTION

被引：14

作者：

TONOUCHI, M ^{[1
]}

SAKAGUCHI, Y ^{[1
]}

KOBAYASHI, T ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1988年 / 27卷 / 01期

关键词：

CERAMIC MATERIALS - Thin Films - ETCHING - RARE EARTH COMPOUNDS - Thin Films - YTTRIUM COMPOUNDS - Thin Films;

D O I：

10.1143/JJAP.27.L98

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new chemical etching technique of high-T//c superconducting Y-Ba-Cu-O and Er-Ba-Cu-O films has been developed by employing a novel etchant Feliox-115. It offered a diffusion-limited etching. The rate (at 20 degree C) and the activation energy of Y-Ba-Cu-O dissolution were, respectively, 0. 5 mu m/min and 0. 32 ev. The Er compound was etched off more preferentially than the Y one: The etching rate of the former was nearly twice as high as the latter. The degradation of T//c induced during this process was at most 4 K.

引用

页码：L98 / L100

页数：3

共 15 条

[1] PLASMA OXIDATION OF THE HIGH-TC SUPERCONDUCTING PEROVSKITES [J].

BAGLEY, BG ;

GREENE, LH ;

TARASCON, JM ;

HULL, GW .

APPLIED PHYSICS LETTERS, 1987, 51 (08) :622-624

[2]

BEDNORZ TG, 1986, Z PHYS B, V64, P189

[3] CRITICAL-CURRENT MEASUREMENTS IN EPITAXIAL-FILMS OF YBA2CU3O7-X COMPOUND [J].

CHAUDHARI, P ;

KOCH, RH ;

LAIBOWITZ, RB ;

MCGUIRE, TR ;

GAMBINO, RJ .

PHYSICAL REVIEW LETTERS, 1987, 58 (25) :2684-2686

[4] EVIDENCE FOR SUPERCONDUCTIVITY ABOVE 40 K IN THE LA-BA-CU-O COMPOUND SYSTEM [J].

CHU, CW ;

HOR, PH ;

MENG, RL ;

GAO, L ;

HUANG, ZJ ;

WANG, YQ .

PHYSICAL REVIEW LETTERS, 1987, 58 (04) :405-407

[5] PULSED LASER ETCHING OF HIGH-TC SUPERCONDUCTING FILMS [J].

INAM, A ;

WU, XD ;

VENKATESAN, T ;

OGALE, SB ;

CHANG, CC ;

DIJKKAMP, D .

APPLIED PHYSICS LETTERS, 1987, 51 (14) :1112-1114

[6] OXYGEN DEFICIENCY IN ER1BA2CU3OY SUPERCONDUCTIVE CERAMICS [J].

KOBAYASHI, T ;

TAKAHASHI, T ;

TONOUCHI, M ;

FUJIWARA, Y ;

KITA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (08) :L1381-L1383

[7] QUANTUM INTERFERENCE DEVICES MADE FROM SUPERCONDUCTING OXIDE THIN-FILMS [J].

KOCH, RH ;

UMBACH, CP ;

CLARK, GJ ;

CHAUDHARI, P ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (03) :200-202

[8] BULK SUPERCONDUCTIVITY OF Y-BA-CU-O AND ER-BA-CU-O [J].

TAKAGI, H ;

UCHIDA, S ;

SATO, H ;

ISHII, H ;

KISHIO, K ;

KITAZAWA, K ;

FUEKI, K ;

TANAKA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05) :L601-L602

[9] IDENTIFICATION OF THE HIGH-TC SUPERCONDUCTOR IN THE SYSTEM Y-BA-CU-O [J].

TAKAYAMAMUROMACHI, E ;

UCHIDA, Y ;

MATSU, Y ;

KATO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (04) :L476-L478

[10]

TAMURA H, 1987, INT SUPERCONDUCTIVIT, P414

← 1 2 →