REFRACTORY LIFT-OFF PROCESS WITH APPLICATIONS TO HIGH-TC SUPERCONDUCTING CIRCUITS

被引:10
作者
HOWARD, RE [1 ]
机构
[1] STANFORD UNIV,DEPT APPL PHYS,STANFORD,CA 94305
关键词
D O I
10.1063/1.90258
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1034 / 1035
页数:2
相关论文
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