OPTICAL-PROPERTIES OF CARBON-FILMS DEPOSITED USING A HYBRID PHYSICAL VAPOR-DEPOSITION TECHNIQUE

被引：3

作者：

DEHBIALAOUI, A

HOLIDAY, P

MATTHEWS, A

机构：

[1] Research Centre in Surface Engineering, Department of Engineering Design and Manufacture, University of Hull, Hull

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 47卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(91)90298-B

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The optical properties of carbon films grown by evaporation of graphite in butane and argon d.c. or low-frequency r.f. plasmas are studied. The characteristics are found to be highly dependent on the substrate material (glass or tool steel) and are also related to process conditions, such as bias voltage and hydrogen-to-carbon ratio in the plasma.

引用

页码：327 / 335

页数：9

共 8 条

[1]

Angus J.C., 1986, PLASMA DEPOSITED THI, P89

[2] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].

BUBENZER, A ;

DISCHLER, B ;

BRANDT, G ;

KOIDL, P .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4590-4595

[3] A COMPARISON OF THE PROPERTIES OF HARD CARBON-FILMS PRODUCED BY DIRECT GAS DEPOSITION AND PLASMA-ASSISTED EVAPORATION [J].

DEHBIALAOUI, A ;

JAMES, AS ;

MATTHEWS, A .

SURFACE & COATINGS TECHNOLOGY, 1990, 43-4 (1-3) :88-98

[4]

HAS Z, 1986, ARCH NAUK MATER, V7, P131

[5]

HAS Z, 1985, JUN INT C DIAM CRYST

[6] PHYSICAL-PROPERTIES OF CARBON-FILMS PRODUCED USING A HYBRID PHYSICAL VAPOR-DEPOSITION TECHNIQUE [J].

HOLIDAY, P ;

DEHBIALAOUI, A ;

MATTHEWS, A .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :315-326

[7]

Tauc J., 1972, Optical properties of solids, P277

[8] GRAPHITE FORMATION IN DIAMOND FILM DEPOSITION [J].

ZHU, W ;

RANDALL, CA ;

BADZIAN, AR ;

MESSIER, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :2315-2324

← 1 →