MONTE-CARLO SIMULATION OF IONIZATION IN A MAGNETRON PLASMA

被引:33
作者
MIRANDA, JE
GOECKNER, MJ
GOREE, J
SHERIDAN, TE
机构
[1] Department of Physics and Astronomy, University of Iowa, Iowa City, Iowa
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 03期
关键词
D O I
10.1116/1.576777
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A Monte Carlo simulation of electrons emitted from the cathode of a planar magnetron is tested against experiments that were reported by Wendt, Lieberman, and Meuth [J. Vac. Sci. Technol. A 6, 1827 (1988)] and by Gu and Lieberman [J. Vac. Sci. Technol. A 6, 2960 (1988)]. Comparing their measurements of the radial profile of current and the axial profile of optical emission to the ionization profiles predicted by the model, we find good agreement for a typical magnetic field strength of 456 G. We also find that at 456 G the product of the average number of ionizations <Ni> and the secondary electron emission coefficient γ is ∼1. This indicates that secondary emission contributes significantly to the ionization that sustains the discharge. At 171 G, however, <Ni>γ≪ 1, revealing that cathode emission is inadequate to sustain a discharge at a low magnetic field. © 1990, American Vacuum Society. All rights reserved.
引用
收藏
页码:1627 / 1631
页数:5
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