共 19 条
[3]
BROWN SC, 1966, BASIC DATA PLASMA PH, P225
[5]
CHUTJIAN A, 1981, PHYS REV A, V23, P2178, DOI 10.1103/PhysRevA.23.2178
[6]
Corliss C. H., 1962, NBS MONOGRAPH, V53, P80
[8]
AXIAL DISTRIBUTION OF OPTICAL-EMISSION IN A PLANAR MAGNETRON DISCHARGE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1988, 6 (05)
:2960-2964
[9]
OPTICAL-EMISSION IN MAGNETRONS - NONLINEAR ASPECTS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:968-971
[10]
LANGMUIR PROBE CHARACTERIZATION OF MAGNETRON OPERATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (03)
:1822-1825