STRAIN DISTRIBUTION IN THIN ALUMINUM FILMS USING X-RAY DEPTH PROFILING

被引：101

作者：

DOERNER, MF

BRENNAN, S

机构：

[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305

[2] STANFORD SYNCHROTRON RADIAT LAB,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.340503

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：126 / 131

页数：6

共 15 条

[1]

Born M, 1980, PRINCIPLES OPTICS

[2] TWO-DIMENSIONAL X-RAY-SCATTERING [J].

BRENNAN, S .

SURFACE SCIENCE, 1985, 152 (APR) :1-9

[3]

Campbell D. S., 1970, HDB THIN FILM TECHNO, P12

[4] Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniques [J].

Doerner, M. F. ;

Gardner, D. S. ;

Nix, W. D. .

JOURNAL OF MATERIALS RESEARCH, 1986, 1 (06) :845-851

[5]

FISCHERCOLBRIE A, 1986, THESIS STANFORD U

[6] MEASUREMENT AND INTERPRETATION OF STRESS IN ALUMINUM-BASED METALLIZATION AS A FUNCTION OF THERMAL HISTORY [J].

FLINN, PA ;

GARDNER, DS ;

NIX, WD .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) :689-699

[7]

HOFFMAN RW, 1976, NATO ADV STUDY I S B, V14, P273

[8] X-RAY DIFFRACTION FROM A BINARY DIFFUSION ZONE [J].

HOUSKA, CR .

JOURNAL OF APPLIED PHYSICS, 1970, 41 (01) :69-&

[9] RECENT DEVELOPMENTS IN STUDY OF MECHANICAL PROPERTIES OF THIN-FILMS [J].

KINOSITA, K .

THIN SOLID FILMS, 1972, 12 (01) :17-&

[10] X-RAY TOTAL-EXTERNAL-REFLECTION-BRAGG DIFFRACTION - STRUCTURAL STUDY OF THE GAAS-AL INTERFACE [J].

MARRA, WC ;

EISENBERGER, P ;

CHO, AY .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) :6927-6933

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