ELECTRICAL-PROPERTIES OF OXYGENATED AMORPHOUS-SI PREPARED BY ION-BEAM SPUTTERING

被引:4
作者
ISHII, K [1 ]
NAOE, M [1 ]
YAMANAKA, S [1 ]
OKANO, S [1 ]
SUZUKI, M [1 ]
机构
[1] KANAZAWA UNIV,FAC ENGN,KANAZAWA,ISHIKAWA 920,JAPAN
关键词
D O I
10.1143/JJAP.18.1395
中图分类号
O59 [应用物理学];
学科分类号
摘要
[No abstract available]
引用
收藏
页码:1395 / 1396
页数:2
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    [J]. THIN SOLID FILMS, 1968, 2 (04) : 327 - &