Variable angle of incidence spectroscopic ellipsometry (VASE(R))* is a rapid and powerful non-destructive optical technique often used to characterize thin films and multilayered structures. A monochromatic, linearly polarized beam of light is reflected from a sample surface at a known angle of incidence, and the resulting polarization state of the reflected beam is measured as a function of wavelength and angle of incidence. Acquired data are then used to determine the optical constants, film thicknesses, and other parameters in the assumed model for the sample. The VASE(R) experiment is particularly useful for the characterization of materials for flat panel displays. In the present work, we demonstrate the use of VASE(R) on several specific materials for display applications: conducting indium tin oxide (ITO), hydrogenated amorphous silicon, and silicon dioxide, all deposited onto glass substrates.
