VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY - A NON-DESTRUCTIVE CHARACTERIZATION TECHNIQUE FOR ULTRATHIN AND MULTILAYER MATERIALS

被引：57

作者：

WOOLLAM, JA

SNYDER, PG

ROST, MC

机构：

来源：

THIN SOLID FILMS | 1988年 / 166卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90393-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：317 / 323

页数：7

共 31 条

[1] STUDIES OF SURFACE, THIN-FILM AND INTERFACE PROPERTIES BY AUTOMATIC SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :289-295

[2] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

APPLIED OPTICS, 1975, 14 (01) :220-228

[3] OPTICAL-PROPERTIES OF ALXGA1-XAS [J].

ASPNES, DE ;

KELSO, SM ;

LOGAN, RA ;

BHAT, R .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :754-767

[4]

ASPNES DE, 1986, SPIE S MICROLITHOGRA

[5]

ASPNES DE, 1984, MATER RES SOC S P, V29, P217

[6]

Azzam RMA, 1977, ELLIPSOMETRY POLARIZ

[7]

BASHARA NM, 1969, RECENT DEV ELLIPSOME

[8]

BASHARA NM, 1976, ELLIPSOMETRY

[9] VARIABLE WAVELENGTH, VARIABLE ANGLE ELLIPSOMETRY INCLUDING A SENSITIVITIES CORRELATION TEST [J].

BUABBUD, GH ;

BASHARA, NM ;

WOOLLAM, JA .

THIN SOLID FILMS, 1986, 138 (01) :27-41

[10]

CARDONA M, 1985, NBS SPEC PUBL, V697

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