VARIABLE WAVELENGTH, VARIABLE ANGLE ELLIPSOMETRY INCLUDING A SENSITIVITIES CORRELATION TEST

被引：80

作者：

BUABBUD, GH

BASHARA, NM

WOOLLAM, JA

机构：

来源：

THIN SOLID FILMS | 1986年 / 138卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90212-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：27 / 41

页数：15

共 18 条

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