STATES OF RESIDUAL-STRESS BOTH IN FILMS AND IN THEIR SUBSTRATES

被引：78

作者：

PERRY, AJ

CHOLLET, L

机构：

[1] CTR SUISSE ELECTR & MICROMECAN SA,CH-2000 NEUCHATEL 7,SWITZERLAND

[2] SWISS FED INST TECHNOL,FESTKORPERPHYS LAB,CH-8093 ZURICH,SWITZERLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573682

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2801 / 2808

页数：8

共 49 条

[1] FUTURE POTENTIAL DEVELOPMENTS IN HARD MATERIALS [J].

ALMOND, EA .

POWDER METALLURGY, 1982, 25 (03) :146-152

[2] THE STRESS IN ION-PLATED HFN AND TIN COATINGS [J].

CHOLLET, L ;

PERRY, AJ .

THIN SOLID FILMS, 1985, 123 (03) :223-234

[3]

CHOLLET L, 1985, J MATER ENERG SYST, V6, P293

[4]

CHOLLET L, UNPUB

[5]

COHEN JB, 1980, NBS US SPEC PUBL, V567

[6]

DOLLE H, 1980, METALL TRANS A, V11, P159

[7] EVALUATION OF (RESIDUAL) STRESSES IN TEXTURED CUBIC METALS [J].

DOLLE, H ;

COHEN, JB .

METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1980, 11 (05) :831-836

[8] INFLUENCE OF MULTIAXIAL STRESS STATES, STRESS GRADIENTS AND ELASTIC-ANISOTROPY ON THE EVALUATION OF (RESIDUAL) STRESSES BY X-RAYS [J].

DOLLE, H .

JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1979, 12 (DEC) :489-501

[9] SYNTHESIS OF TITANIUM CARBONITRIDE FILMS BY PHYSICAL VAPOR-DEPOSITION AND THEIR STRUCTURE [J].

ENOMOTO, Y ;

YAMANAKA, K .

THIN SOLID FILMS, 1981, 86 (01) :L201-L203

[10]

Exner H.E., 1979, INT MET REV, V4, P149

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