ADSORPTION OF TRI-METHYL ALUMINUM MOLECULES ON SILICON

被引：73

作者：

SALANECK, WR

BERGMAN, R

SUNDGREN, JE

ROCKETT, A

MOTOOKA, T

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MAT SCI,COORDINATED SCI LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

SURFACE SCIENCE | 1988年 / 198卷 / 03期

关键词：

D O I：

10.1016/0039-6028(88)90378-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：461 / 472

页数：12

共 24 条

[1] ANALYSIS OF THIN-FILMS ARISING FROM ELECTRON-BEAM-INDUCED, ION-BEAM-INDUCED AND PHOTON-BEAM-INDUCED DECOMPOSITION OF CR(CO)6 AND AL(CH3)3 [J].

BIGELOW, RW ;

BLACK, JG ;

DUKE, CB ;

SALANECK, WR ;

THOMAS, HR .

THIN SOLID FILMS, 1982, 94 (03) :233-247

[2]

BISWAS DR, 1984, J ELECTROCHEM SOC, V130, P234

[3] ANGULAR-DEPENDENT STUDIES ON SOME PROTOTYPE VERTICALLY AND LATERALLY INHOMOGENEOUS SAMPLES [J].

CLARK, DT ;

DILKS, A ;

SHUTTLEWORTH, D ;

THOMAS, HR .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1978, 14 (04) :247-258

[4]

COTTON FA, 1980, ADV INORGANIC CHEM, P112

[5] PHOTOEMISSION OBSERVATIONS OF PI-D BONDING AND SURFACE-REACTIONS OF ADSORBED HYDROCARBONS ON NI(111) [J].

DEMUTH, JE ;

EASTMAN, DE .

PHYSICAL REVIEW LETTERS, 1974, 32 (20) :1123-1127

[6] THE VIBRATIONS AND STRUCTURE OF PYRIDINE CHEMISORBED ON AG(111) - THE OCCURRENCE OF A COMPRESSIONAL PHASE-TRANSFORMATION [J].

DEMUTH, JE ;

CHRISTMANN, K ;

SANDA, PN .

CHEMICAL PHYSICS LETTERS, 1980, 76 (02) :201-206

[7]

ERLICH DJ, 1982, J VACUUM SCI TECHNOL, V21, P23

[8]

FADLEY CS, 1972, ELECTRON SPECTROSCOP, P233

[9] SURFACE-MORPHOLOGY OF OXIDIZED AND ION-ETCHED SILICON BY SCANNING TUNNELING MICROSCOPY [J].

FEENSTRA, RM ;

OEHRLEIN, GS .

APPLIED PHYSICS LETTERS, 1985, 47 (02) :97-99

[10]

LIEDBERG B, 1985, PROG COLL POL SCI S, V70, P67

← 1 2 3 →