IMPROVEMENT OF RESOLUTION BY CONVERGENT-BEAM ILLUMINATION IN SURFACE PROFILE IMAGES OF HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY

被引:25
作者
MITOME, M [1 ]
TAKAYANAGI, K [1 ]
TANISHIRO, Y [1 ]
机构
[1] TOKYO INST TECHNOL,DEPT PHYS,MEGURO KU,TOKYO 152,JAPAN
关键词
D O I
10.1016/0304-3991(90)90042-K
中图分类号
TH742 [显微镜];
学科分类号
摘要
The resolution of surface profile images of high resolution electron microscopy (HRTEM) is improved by about 0.03 nm under the convergent-beam illumination (CBI) condition, although nearly parallel beam illumination is used in conventional HRTEM. Under the CBI condition the resolution limit given by the contrast transfer function shifts to the higher reflection angle side, and more diffracted (scattered) waves contribute to the image. From computer simulation the structure image of the Au(001)5 X 1 reconstructed surface is obtained only under the CBI condition. CBI is very useful when there is Bragg reflection or when there are diffraction rods due to surface truncation at a reflection angle near the resolution limit. © 1990.
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页码:255 / 260
页数:6
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