NEW APPROACH FOR STUDY OF TRANSMISSION SPUTTERING

被引：6

作者：

AYRAULT, G

AVERBACK, RS

SEIDMAN, DN

机构：

[1] CORNELL UNIV,DEPT MAT SCI,ITHACA,NY 14853

[2] CORNELL UNIV,CTR MAT SCI,ITHACA,NY 14853

来源：

SCRIPTA METALLURGICA | 1978年 / 12卷 / 02期

关键词：

D O I：

10.1016/0036-9748(78)90147-3

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

页码：119 / 123

页数：5

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