A new approach for interpreting of impedance spectroscopy (IMS) data has been developed. It is shown by the generalized logarithm of impedance vs. logarithm of frequency (Bode) diagrams, that specific recharging processes in different layers of oxide scales can be characterized by different slopes of the impedance graph. Equivalent electrical networks can be designed which contain the minimum of circuit elements to fit the significant details in the experimentally obtained Bode diagram. The thickness of the total oxide and the thickness of intrinsic oxide scales can be determined. For the total oxide thickness a good agreement with other methods is obtained.