COMPUTER-PROGRAMS FOR THE DESIGN AND OPTIMIZATION OF ELECTRON AND ION-BEAM LITHOGRAPHY SYSTEMS

被引：33

作者：

MUNRO, E

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1987年 / 258卷 / 03期

关键词：

D O I：

10.1016/0168-9002(87)90929-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：443 / 461

页数：19

共 59 条

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