IMPROVED MOSFET SHORT-CHANNEL DEVICE USING GERMANIUM IMPLANTATION

被引:8
作者
PFIESTER, JR [1 ]
LAW, ME [1 ]
DUTTON, RW [1 ]
机构
[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
关键词
D O I
10.1109/55.738
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:343 / 346
页数:4
相关论文
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