ONE-DIMENSIONAL MODELING STUDIES OF THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL

被引：13

作者：

GOVINDAN, TR

MEYYAPPAN, M

机构：

来源：

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | 1995年 / 100卷 / 04期

关键词：

FLUID MODEL; HYBRID MODEL; ONE-DIMENSIONAL; PLASMA PROCESSING; REFERENCE CELL; RF DISCHARGE;

D O I：

10.6028/jres.100.035

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understanding of the discharge mechanisms and reproduce several critical discharge features observed experimentally.

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收藏

页码：463 / 472

页数：10

相关论文

共 15 条

[1] PARTICLE-IN-CELL CHARGED-PARTICLE SIMULATIONS, PLUS MONTE-CARLO COLLISIONS WITH NEUTRAL ATOMS, PIC-MCC [J].

BIRDSALL, CK .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :65-85

[2] ABSOLUTE SPATIALLY-RESOLVED AND TEMPORALLY-RESOLVED OPTICAL-EMISSION MEASUREMENTS OF RF GLOW-DISCHARGES IN ARGON [J].

DJUROVIC, S ;

ROBERTS, JR ;

SOBOLEWSKI, MA ;

OLTHOFF, JK .

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1993, 98 (02) :159-180

[3] MODELING OF THE LOW-PRESSURE ARGON POSITIVE-COLUMN [J].

FERREIRA, CM ;

RICARD, A .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2261-2271

[4] ELECTRON AND METASTABLE DENSITIES IN PARALLEL-PLATE RADIOFREQUENCY DISCHARGES [J].

GREENBERG, KE ;

HEBNER, GA .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (12) :8126-8133

[5] THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES [J].

HARGIS, PJ ;

GREENBERG, KE ;

MILLER, PA ;

GERARDO, JB ;

TORCZYNSKI, JR ;

RILEY, ME ;

HEBNER, GA ;

ROBERTS, JR ;

OLTHOFF, JK ;

WHETSTONE, JR ;

VANBRUNT, RJ ;

SOBOLEWSKI, MA ;

ANDERSON, HM ;

SPLICHAL, MP ;

MOCK, JL ;

BLETZINGER, P ;

GARSCADDEN, A ;

GOTTSCHO, RA ;

SELWYN, G ;

DALVIE, M ;

HEIDENREICH, JE ;

BUTTERBAUGH, JW ;

BRAKE, ML ;

PASSOW, ML ;

PENDER, J ;

LUJAN, A ;

ELTA, ME ;

GRAVES, DB ;

SAWIN, HH ;

KUSHNER, MJ ;

VERDEYEN, JT ;

HORWATH, R ;

TURNER, TR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (01) :140-154

[6] FLUID SIMULATIONS OF GLOW-DISCHARGES - EFFECT OF METASTABLE ATOMS IN ARGON [J].

LYMBEROPOULOS, DP ;

ECONOMOU, DJ .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) :3668-3679

[7] RADIO-FREQUENCY DISCHARGE MODELING - MOMENT EQUATIONS APPROACH [J].

MEYYAPPAN, M ;

GOVINDAN, TR .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) :2250-2259

[8]

Meyyappan M., 1994, COMPUTATIONAL MODELI

[9] SPATIAL VARIATIONS IN THE CHARGE-DENSITY OF ARGON DISCHARGES IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE REACTOR [J].

OVERZET, LJ ;

HOPKINS, MB .

APPLIED PHYSICS LETTERS, 1993, 63 (18) :2484-2486

[10] COMPARISON OF ELECTRON-DENSITY MEASUREMENTS MADE USING A LANGMUIR PROBE AND MICROWAVE INTERFEROMETER IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE REACTOR [J].

OVERZET, LJ ;

HOPKINS, MB .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (07) :4323-4330