EXPERIMENTAL STUDIES OF A KRF AND ARF DISCHARGE LASER

被引:47
作者
SZE, RC
LOREE, TR
机构
关键词
D O I
10.1109/JQE.1978.1069724
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:944 / 950
页数:7
相关论文
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