NEW SPUTTERING SYSTEM FOR MANUFACTURING ZNO THIN-FILM SAW DEVICES

被引：13

作者：

OHJI, K

YAMAZAKI, O

WASA, K

HAYAKAWA, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 04期

关键词：

D O I：

10.1116/1.569817

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1601 / 1604

页数：4

共 14 条

[1]

FOSTER NF, 1970, HDB THIN FILM TECHNO, pCH15

[2]

HICKERNELL FS, 1973, J APPL PHYS, V44, P1061, DOI 10.1063/1.1662307

[3] PIEZOELECTRIC TRANSDUCER MATERIALS [J].

JAFFE, H ;

BERLINCOURT, DA .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1965, 53 (10) :1372-+

[4] THEORY OF INTERDIGITAL COUPLERS ON NONPIEZOELECTRIC SUBSTRATES [J].

KINO, GS ;

WAGERS, RS .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) :1480-1488

[5] ELASTIC-SURFACE-WAVE TEMPERATURE COEFFICIENTS OF DELAY-LINE WITH ZNO THIN-FILM [J].

NAKAGAWA, Y .

APPLIED PHYSICS LETTERS, 1977, 31 (02) :56-57

[6] HIGHLY ORIENTED ZNO FILMS BY RF SPUTTERING OF HEMISPHERICAL ELECTRODE SYSTEM [J].

OHJI, K ;

TOHDA, T ;

WASA, K ;

HAYAKAWA, S .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (04) :1726-1728

[7]

ONO S, 1977, WAVE ELECTRON, V3, P35

[8]

ONO S, 1977, Patent No. 4037176

[9] LATTICE PARAMETERS OF ZNO FROM 4.2 DEGREES TO 296 DEGREES K [J].

REEBER, RR .

JOURNAL OF APPLIED PHYSICS, 1970, 41 (13) :5063-&

[10] PREPARATION OF ZNO THIN FILMS BY SPUTTERING OF COMPOUND IN OXYGEN AND ARGON - (0.1 TO 10 MU THICK - SUBSTRATES - SAPPHIRE PYREX GLASS GOLD PLATE - ULTRASONICS - PIEZOELECTRICS - TRANSDUCERS - E) [J].

ROZGONYI, GA ;

POLITO, WJ .

APPLIED PHYSICS LETTERS, 1966, 8 (09) :220-&

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