GROWTH AND MORPHOLOGY OF CARBON GRAINS

被引:45
作者
GANGULY, B
GARSCADDEN, A
WILLIAMS, J
HAALAND, P
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1993年 / 11卷 / 04期
关键词
D O I
10.1116/1.578451
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Carbon grains less than 1 mum in diameter have been formed in low pressure rare-gas discharges using graphite electrodes and audio frequency excitation. The grains have been examined in situ with Mie etching scattering to determine growth rates and ex situ using scanning and transmission electron microscopies to quantitatively examine their morphology. These results, as well as perturbation of the plasma impedance by the dust, suggest a dust formation mechanism based on ionization of sputtered carbon and subsequent collection of C+ ions by the Debye sheaths which surround negative particles in the plasma.
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页码:1119 / 1125
页数:7
相关论文
共 23 条
[1]   NUMERICAL AND EXPERIMENTAL DIAGNOSTICS OF RF DISCHARGES IN PURE AND DUSTY ARGON [J].
BELENGUER, P ;
BLONDEAU, JP ;
BOUFENDI, L ;
TOOGOOD, M ;
PLAIN, A ;
BOUCHOULE, A ;
LAURE, C ;
BOEUF, JP .
PHYSICAL REVIEW A, 1992, 46 (12) :7923-7933
[2]  
BLACK JH, 1988, ADV ATOM MOL PHYS, V25, P477
[3]   MEASUREMENTS OF PARTICLE-SIZE KINETICS FROM NANOMETER TO MICROMETER SCALE IN A LOW-PRESSURE ARGON-SILANE RADIOFREQUENCY DISCHARGE [J].
BOUFENDI, L ;
PLAIN, A ;
BLONDEAU, JP ;
BOUCHOULE, A ;
LAURE, C ;
TOOGOOD, M .
APPLIED PHYSICS LETTERS, 1992, 60 (02) :169-171
[4]  
BOUFENDI L, UNPUB
[5]   PARTICULATE TEMPERATURE IN RADIO-FREQUENCY GLOW-DISCHARGES [J].
DAUGHERTY, JE ;
GRAVES, DB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :1126-1131
[6]   SHEATH STRUCTURE AROUND PARTICLES IN LOW-PRESSURE DISCHARGES [J].
DAUGHERTY, JE ;
PORTEOUS, RK ;
KILGORE, MD ;
GRAVES, DB .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (09) :3934-3942
[7]   ELECTROSTATIC FORCES ON SMALL PARTICLES IN LOW-PRESSURE DISCHARGES [J].
DAUGHERTY, JE ;
PORTEOUS, RK ;
GRAVES, DB .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (04) :1617-1620
[8]   COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J].
DIRKS, AG ;
LEAMY, HJ .
THIN SOLID FILMS, 1977, 47 (03) :219-233
[9]   PHYSICS OF DUST GRAINS IN HOT GAS [J].
DRAINE, BT ;
SALPETER, EE .
ASTROPHYSICAL JOURNAL, 1979, 231 (01) :77-94
[10]  
Engel A., 1965, IONIZED GASES