EFFECTS OF ELECTRON-BOMBARDMENT ON THE SURFACE-COMPOSITION OF WO3, OXIDIZED W AND TA FOILS

被引:23
作者
LIN, TT
LICHTMAN, D
机构
[1] UNIV WISCONSIN,DEPT PHYS,MILWAUKEE,WI 53201
[2] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201
关键词
D O I
10.1063/1.326161
中图分类号
O59 [应用物理学];
学科分类号
摘要
By using both Auger electron spectroscopy and electron-stimulated desorption measurement techniques, electron-beam-irradiation-induced oxide reduction has been observed on WO3 and Ta2O5. In both cases, the light element (oxygen) is preferentially removed which in turn leaves the specimens' surface enriched with the metal element. In addition, visible darkening in the beam-illuminated area provides evidence of beam-irradiation-induced oxide reduction and irradiation-enhanced diffusion effects. Measurements of Auger electron intensities from the composition altered overlayer indicate that the beam-irradiated overlayer consists of nearly equal parts of metal and oxygen atoms upon extended electron bombardment. The observed changes in the surface composition of contaminated specimens also show additional beam effects like induced out-diffusion and beam-induced desorption. A brief comparison with the published results concerning ion irradiation on the corresponding specimens is also included.
引用
收藏
页码:1298 / 1303
页数:6
相关论文
共 11 条
[1]  
BREUSOV ON, 1973, RUSS J INORG CHEM, V18, P157
[2]  
CHANG CC, 1974, CHARACTERIZATION SOL, P509
[3]  
DAVIS LE, 1976, HDB AUGER ELECTRON S
[4]   PREDICTION OF AUGER PEAK INTENSITIES FROM OVERLAYER STRUCTURES [J].
DOBSON, PJ ;
REGAN, BJ .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (08) :694-695
[5]  
HAAS TW, 1972, ADSORPTION DESORPTIO, P359
[6]   ESCA STUDIES ON CHANGES IN SURFACE COMPOSITION UNDER ION-BOMBARDMENT [J].
HOLM, R ;
STORP, S .
APPLIED PHYSICS, 1977, 12 (01) :101-112
[7]  
Kelly R., 1973, Radiation Effects, V19, P39, DOI 10.1080/00337577308232213
[8]   ESCA STUDIES OF METAL-OXYGEN SURFACES USING ARGON AND OXYGEN ION-BOMBARDMENT [J].
KIM, KS ;
BAITINGER, WE ;
AMY, JW ;
WINOGRAD, N .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 5 (NOV-D) :351-367
[9]   ION DESORPTION BY CORE-HOLE AUGER DECAY [J].
KNOTEK, ML ;
FEIBELMAN, PJ .
PHYSICAL REVIEW LETTERS, 1978, 40 (14) :964-967
[10]  
MURTI DK, UNPUBLISHED