RBS AND ERD ANALYSIS USING LITHIUM IONS

被引：11

作者：

LIU, JR ^{[1
]}

ZHENG, ZS ^{[1
]}

ZHANG, ZH ^{[1
]}

CHU, WK ^{[1
]}

机构：

[1] UNIV HOUSTON,TEXAS CTR SUPERCONDUCT,HOUSTON,TX 77204

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 85卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)95784-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The advantages of using ions heavier than alpha-particles for RBS analysis with a noticeable improvement of mass resolution, sensitivity and depth resolution in RBS are well known since the 1970s. The applications are still very limited because of the uncertainty in stopping power, complicated detection techniques and the lesser accessibility of heavy ion beams. In this paper, we emphasize the applications of lithium ions for RBS and channeling analysis, based on the analysis of recent stopping power measurements and its systematic, the development of a silicon surface barrier detector for heavy ions as well as the accessibility of lithium ions at small accelerators. Examples of RBS analysis of high temperature superconductors and other thin films will be presented, as well as ERD analysis of hydrogen in CVD samples using lithium ions.

引用

页码：51 / 54

页数：4

共 17 条

[11]

TEPLOVA YA, 1957, SOV PHYS JETP, V5, P797

[12]

THOMAS JP, 1976, ION BEAM SURFACE LAY, V1, P425

[13] EXPERIMENTAL DETERMINATION OF RATE OF ENERGY LOSS FOR SLOW H-1, H-2, HE-4, LI-6 NUCLEI IN AU AND AL [J].

WILCOX, HA .

PHYSICAL REVIEW, 1948, 74 (12) :1743-1754

[14] ANOMALOUS ION CHANNELING IN INGAAS GAAS STRAINED HETEROJUNCTION [J].

WU, CW ;

YIN, SD ;

ZHANG, JP ;

XIAO, GM ;

LIU, JR ;

ZHU, PR .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) :2100-2104

[15]

Ziegler, 1985, STOPPING RANGE IONS

[16]

Ziegler J., 1980, STOPPING RANGES IONS, V5

[17] THE STOPPING OF IONS IN COMPOUNDS [J].

ZIEGLER, JF ;

MANOYAN, JM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 35 (3-4) :215-228

← 1 2 →