INFLUENCE OF THERMAL AGING ON TINX THIN-FILM RESISTORS

被引：1

作者：

BEENSHMARCHWICKA, G

BERLICKI, T

机构：

[1] Institute of Electronic Technology, Technical University of Wrocław, 50-372 Wrocław

来源：

THIN SOLID FILMS | 1979年 / 62卷 / 02期

关键词：

D O I：

10.1016/0040-6090(79)90313-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have examined the dispersion values of thin film resistors of titanium nitride obtained by reactive evaporation of titanium in a nitrogen atmosphere and subjected to thermal aging. We have found that the dependence of relative changes ΔR/R of the resistance on the aging time t is described by the expression ΔR/R = At 1 2. The mean square deviation of the resistance variations as a function of ΔR/R is a straight line on a log-log plot with a slope of 0.8-1. This has been explained by the dispersion of material constants between the resistors. © 1979.

引用

页码：255 / 257

页数：3

共 8 条

[1] AGING MECHANISMS IN THIN-FILM CR, CRAU AND TINX RESISTORS [J].