RELAXATION MODULUS AND THERMAL-EXPANSION COEFFICIENT OF POLYIMIDE FILMS COATED ON SUBSTRATES

被引:18
作者
JOU, JH
CHEN, LJ
机构
[1] Department of Materials Science and Engineering, Tsing Hua University, Hsin Chu
关键词
D O I
10.1063/1.105573
中图分类号
O59 [应用物理学];
学科分类号
摘要
A bending beam technique with the use of two substrates, silicon and gallium arsenide, has been successfully employed to simultaneously determine the biaxial relaxation modulus, E(f)/(1 - nu-f), and thermal expansion coefficient, alpha-f, of a rigid rod-like polyimide film, pyromellitic dianhydride-benzidine (PMDA-B) coated on a substrate. As measured, the two properties, especially alpha-f, significantly increase with the increase of film thickness. At 150-degrees-C, for example, the obtained E(f)(1 - nu-f) increases from 6.0 to 8.2 X 10(9) N/m2, and alpha-f from -0.33 to 2.42 x 10(-6)/degrees-C for thicknesses ranging from 10 to 30-mu-m.
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页码:46 / 47
页数:2
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