A NEW APPARATUS FOR IMPACT COLLISION ION-SCATTERING SPECTROSCOPY

被引：5

作者：

KAWAMOTO, K

INARI, K

MORI, T

OURA, K

机构：

[1] Department of Electronic Engineering, Osaka University, Suita, Osaka

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 9A期

关键词：

LOW-ENERGY ION SCATTERING; ICISS; SURFACE STRUCTURAL ANALYSIS; SHALLOW INTERFACE; FOCUSING EFFECT; SHADOW CONE; CHANNELING;

D O I：

10.1143/JJAP.34.4917

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new type of time-of-flight impact collision ion scattering spectroscopy apparatus is presented. The system mainly consists of a 20 kV Penning ion source, a beam chopper and an annular-type micro-channel plate. Ion beam energy can be changed in the range from 2 to 20 keV. Since the shadow cone radius can be varied meaningfully by selecting suitable acceleration voltage,it becomes possible to determine structures of subsurfaces or buried regions as well as of the topmost layer. We show that this apparatus enables us to observe layers as much as 10 layers below the topmost layer. In addition, we measured the shadow cone radius of 10 keV He-4(+) incident on the Si(001) surface, and the result is compared with a calculated value.

引用

收藏

页码：4917 / 4919

页数：3

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