LOW-ENERGY ION-SCATTERING AT SURFACES

The field of low-energy ion scattering for surface interactions at metals, alloys, catalysts and semiconductors is reviewed. The description of experimental set-up's for ion and neutral detection has been included. One of the topics is ion scattering for elemental analysis of the topmost layer to be performed in the classical noble-gas ion scattering spectroscopy approach (ISS) as well as with direct recoil spectroscopy (DRS). Emphasis has also been put on surface structure analysis including ion beam crystallography with low-energy ion backscattering (ICISS) for single-crystal surfaces. The basic principles, classical scattering theory, the effect of shadowing and blocking, and some of the computer simulation programs are briefly described. A discussion for understanding the physics of ion-surface interactions, charge exchange of various projectiles during collisions, molecule scattering and bond breaking is also included.