POSSIBLE MECHANISMS FOR PARTICLE-TRANSPORT IN ION IMPLANTERS

被引：5

作者：

BROWN, DA ^{[1
]}

SFERLAZZO, P ^{[1
]}

OHANLON, JF ^{[1
]}

机构：

[1] EATON SEMICOND EQUIPMENT DIV,BEVERLY,MA 01915

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 55卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(91)96192-N

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Possible mechanisms for the charging and entrapment of particulate contamination in a cylindrical ion beam are investigated. A model is developed which describes the charging, and steady-state charge acquired by the particle. Confinement within the beam is then investigated by comparing the resulting electric force with the opposing force of gravity. The model predicts a region about the center of the beam where a net trapping force may exist. Calculations of this force for various operating conditions suggest a strong dependence on parameters that affect the beam-ion density.

引用

页码：348 / 354

页数：7

共 7 条

[1]

BROWN DA, 1990, THESIS U ARIZONA TUC

[2] CLASSICAL THEORY OF ELECTRONIC AND IONIC INELASTIC COLLISIONS [J].