ANGULAR-DISTRIBUTIONS OF SPUTTERED ZIRCONIUM ATOMS

被引：7

作者：

WHITAKER, TJ ^{[1
]}

LI, A ^{[1
]}

JONES, PL ^{[1
]}

WATTS, RO ^{[1
]}

机构：

[1] UNIV WASHINGTON,DEPT CHEM,SEATTLE,WA 98195

来源：

JOURNAL OF CHEMICAL PHYSICS | 1993年 / 98卷 / 07期

关键词：

D O I：

10.1063/1.464880

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ion beams with energies in the range 1-2 keV are used to sputter neutral Zr atoms from a polycrystalline surface. Laser induced fluorescence detection is used to obtain angular distributions of sputtered neutrals as a function of ion impact direction, ion mass, ion energy, and spin-orbit state of the exiting atoms. About 40% of the sputtered atoms are excited. Angular distributions depend weakly on ion mass and energy. The angular distributions are fitted well by a modified form of the Roosendaal and Saunders model of sputtering.

引用

页码：5887 / 5898

页数：12

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