OPTICAL PROFILE TRANSDUCER

被引：12

作者：

SAWATARI, T ^{[1
]}

ZIPIN, RB ^{[1
]}

机构：

[1] BENDIX CORP, DIV AUTOMAT & MEASUREMENT, DAYTON, OH 45401 USA

来源：

OPTICAL ENGINEERING | 1979年 / 18卷 / 02期

关键词：

D O I：

10.1117/12.7972354

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A noncontacting optical transducer, which measures the profile of machined surfaces, was constructed and tested. The transducer consists of a microscope objective, a point-source illuminator, and two photodetectors. The dynamic range is typically 500 microinches with an accuracy of better than 10 microinches. The output is a profile signal along a line on the surface under examination. The profile of a machined surface obtained by the optical-transducer correlates well with that obtained by a given mechanical device which uses a diamond stylus. Principles of operation, results of various performance tests, and potential applications of the optical transducer are discussed.

引用

页码：222 / 225

页数：4