MECHANICAL-STRESS IN VLSI INTERCONNECTIONS - ORIGINS, EFFECTS, MEASUREMENT, AND MODELING

[1] ABE H, 1992, JAP SOC APPL PHYS 39, P658

[2] DIRECT TRANSMISSION ELECTRON MICROSCOPE OBSERVATION OF ELECTROTRANSPORT IN ALUMINUM THIN FILMS [J]. APPLIED PHYSICS LETTERS, 1967, 11 (08) : 263 - &

[3] BURGES U, 1995, MATER RES SOC SYMP P, V356, P423

[4] CHOUAF A, 1993, MATER RES SOC SYMP P, V309, P211, DOI 10.1557/PROC-309-211

[5] Curry J., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P6, DOI 10.1109/IRPS.1984.362013

[6] CRACKING AND SPALLING OF PROTECTIVE OXIDE LAYERS [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 120 : 139 - 146

[7] Flinn P.A., 2011, MATER RES STAND, V130, DOI [10.1557/PROC-130-41, DOI 10.1557/PROC-130-41]

[8] A NEW X-RAY DIFFRACTOMETER DESIGN FOR THIN-FILM TEXTURE, STRAIN, AND PHASE CHARACTERIZATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 1749 - 1755

[9] MEASUREMENT AND INTERPRETATION OF STRESS IN COPPER-FILMS AS A FUNCTION OF THERMAL HISTORY [J]. JOURNAL OF MATERIALS RESEARCH, 1991, 6 (07) : 1498 - 1501

[10] MEASUREMENT AND INTERPRETATION OF STRESS IN ALUMINUM-BASED METALLIZATION AS A FUNCTION OF THERMAL HISTORY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) : 689 - 699

[1] ABE H, 1992, JAP SOC APPL PHYS 39, P658

[2] DIRECT TRANSMISSION ELECTRON MICROSCOPE OBSERVATION OF ELECTROTRANSPORT IN ALUMINUM THIN FILMS [J]. APPLIED PHYSICS LETTERS, 1967, 11 (08) : 263 - &

[3] BURGES U, 1995, MATER RES SOC SYMP P, V356, P423

[4] CHOUAF A, 1993, MATER RES SOC SYMP P, V309, P211, DOI 10.1557/PROC-309-211

[5] Curry J., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P6, DOI 10.1109/IRPS.1984.362013

[6] CRACKING AND SPALLING OF PROTECTIVE OXIDE LAYERS [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 120 : 139 - 146

[7] Flinn P.A., 2011, MATER RES STAND, V130, DOI [10.1557/PROC-130-41, DOI 10.1557/PROC-130-41]

[8] A NEW X-RAY DIFFRACTOMETER DESIGN FOR THIN-FILM TEXTURE, STRAIN, AND PHASE CHARACTERIZATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 1749 - 1755

[9] MEASUREMENT AND INTERPRETATION OF STRESS IN COPPER-FILMS AS A FUNCTION OF THERMAL HISTORY [J]. JOURNAL OF MATERIALS RESEARCH, 1991, 6 (07) : 1498 - 1501

[10] MEASUREMENT AND INTERPRETATION OF STRESS IN ALUMINUM-BASED METALLIZATION AS A FUNCTION OF THERMAL HISTORY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) : 689 - 699