MODELING OF CHEMICAL VAPOR-DEPOSITION .1. GENERAL-CONSIDERATIONS

[1] ADAMSON AW, 1967, PHYSICAL CHEM SURFAC

[2] BLOEM J, 1978, CURRENT TOPICS MATER, V1, P147

[3] Cadoret R., 1980, CURRENT TOPICS MATER, V5, P219

[4] Chernov A. A., 1977, Soviet Physics - Crystallography, V22, P18

[5] THEORETICAL-ANALYSIS OF EQUILIBRIUM ADSORPTION LAYERS IN CVD SYSTEMS (SI-H-CL, GA-AS-H-CL) [J]. JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) : 73 - 81

[6] EYRING H, 1975, PHYSICAL CHEM ADV TR, P22

[7] EYRING H, 1963, Z ELECTROCHEM, V67, P731

[8] COVERAGE EFFECTS ON BCF SURFACE DIFFUSION-MODEL [J]. JOURNAL OF CRYSTAL GROWTH, 1974, 22 (04) : 333 - 334

[9] GLASSTONE S, 1965, THEORY RATE PROCESSE

[10] GREWAND KE, 1952, THERMODIFFUSION GASE

[1] ADAMSON AW, 1967, PHYSICAL CHEM SURFAC

[2] BLOEM J, 1978, CURRENT TOPICS MATER, V1, P147

[3] Cadoret R., 1980, CURRENT TOPICS MATER, V5, P219

[4] Chernov A. A., 1977, Soviet Physics - Crystallography, V22, P18

[5] THEORETICAL-ANALYSIS OF EQUILIBRIUM ADSORPTION LAYERS IN CVD SYSTEMS (SI-H-CL, GA-AS-H-CL) [J]. JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) : 73 - 81

[6] EYRING H, 1975, PHYSICAL CHEM ADV TR, P22

[7] EYRING H, 1963, Z ELECTROCHEM, V67, P731

[8] COVERAGE EFFECTS ON BCF SURFACE DIFFUSION-MODEL [J]. JOURNAL OF CRYSTAL GROWTH, 1974, 22 (04) : 333 - 334

[9] GLASSTONE S, 1965, THEORY RATE PROCESSE

[10] GREWAND KE, 1952, THERMODIFFUSION GASE