TEMPERATURE-DEPENDENCE OF DAMAGE RANGES IN SOME METALS AFTER ARGON IMPLANTATION

被引:10
作者
FRIEDLAND, E
ALBERTS, HW
FLETCHER, M
机构
[1] Department of Physics, University of Pretoria, Pretoria
关键词
D O I
10.1016/0168-583X(90)90883-V
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The depths of radiation damage after implanting 150 keV argon ions into single crystals of iron, nickel and copper at substrate temperatures between 77 and 523 K have been investigated. In all cases a moderate increase of damage ranges with temperature was observed. The ratio of damage depth to projected ion range at liquid-nitrogen temperature has been determined as 1.1 for iron, 2.0 for nickel and 2.8 for copper. These results might indicate a dependence of damage depths on thermal properties and lattice structure of the target material. © 1990.
引用
收藏
页码:492 / 494
页数:3
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