FINE PATTERNING OF THIN SOL-GEL FILMS

被引：45

作者：

KRUG, H

MERL, N

SCHMIDT, H

机构：

[1] Institut für Neue Materialien, Im Stadtwald

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1992年 / 147卷

关键词：

D O I：

10.1016/S0022-3093(05)80656-8

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

An embossing technique was used to fabricate surface reliefs in organically modified ceramics of the Ormocer type, synthesized via the sol-gel route. Embossing techniques for these materials are described and results of embossed grids and gratings with up to 2400 lines/mm and peak-to-trough values up to 3 mum are presented.

引用

页码：447 / 450

页数：4

共 15 条

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