MEASUREMENT OF ABSOLUTE HYDROGEN DISSOCIATION IN A DIAMOND DEPOSITION SYSTEM

被引：20

作者：

CHILDS, MA

MENNINGEN, KL

TOYODA, H

UEDA, Y

ANDERSON, LW

LAWLER, JE

机构：

[1] NAGOYA UNIV,DEPT ELECT ENGN,CHIKUSA KU,NAGOYA 46401,JAPAN

[2] MITSUBISHI HEAVY IND CO LTD,TAKASAGO RES & DEV FLUID DYNAM LAB CTR,ARAI,HYOGO 676,JAPAN

来源：

PHYSICS LETTERS A | 1994年 / 194卷 / 1-2期

关键词：

D O I：

10.1016/0375-9601(94)00696-M

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The ratio of atomic to molecular hydrogen as a function of position in a hot filament diamond chemical vapor deposition system is determined from spatially resolved measurements of CH3 and CH densities. High sensitivity white light absorption spectroscopy is used to obtain the CH and CH3 densities. The H atom mole fractions reported here are significantly higher than@ those reported in the most directly comparable previous experiments.

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页码：119 / 123

页数：5

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