2-LEVEL EFFECT IN SHEET RESISTANCE MEASUREMENTS MADE WITH A 4-POINT PROBE

被引:5
作者
TONG, AH
DUPNOCK, A
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10.1149/1.2408058
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:390 / &
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