EFFECT OF PREIONIZATION UNIFORMITY ON A KRF LASER

被引:23
作者
SUMIDA, S [1 ]
KUNITOMO, K [1 ]
KABURAGI, M [1 ]
OBARA, M [1 ]
FUJIOKA, T [1 ]
SATO, K [1 ]
机构
[1] INST PLASMA PHYS,FURO CHO,CHIGUSA KU,NAGOYA,JAPAN
关键词
D O I
10.1063/1.329074
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2682 / 2686
页数:5
相关论文
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